|ITEM METADATA RECORD
|Title: ||Advanced interconnects and contact materials and processing for future IC's|
|Authors: ||Li, H|
Froyen, Ludo #
|Issue Date: ||Apr-1998 |
|Host Document: ||Proc. MRS 1998 Spring Meeting, Materials Research Society Symposium vol:vol. 514 pages:43-49|
|Conference: ||location:San Francisco, California, USA date:13-17 April 1998|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Physical Metallurgy and Materials Engineering Section (-)|
Associated Section of ESAT - INSYS, Integrated Systems
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