Title: Advanced interconnects and contact materials and processing for future IC's
Authors: Li, H
Witvrouw, A
Jin, S
Bender, H
Maex, Karen
Froyen, Ludo #
Issue Date: Apr-1998
Host Document: Proc. MRS 1998 Spring Meeting, Materials Research Society Symposium vol:vol. 514 pages:43-49
Conference: location:San Francisco, California, USA date:13-17 April 1998
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physical Metallurgy and Materials Engineering Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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