Title: Characterisation of ALD diffusion barrier growth on a low-K dielectric polymer surface
Authors: Martin, A ×
Schuhmacher, J
Le, Quoc Toan
Whelan, C
Schaekers, M
Celis, Jean-Pierre
Maex, Karen #
Issue Date: Nov-2002
Conference: International Symposium on Polymers in Microelectronics edition:2 location:Orlando, USA date:13-15 November 2002
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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