Title: Ion energy distribution during the pulsed sputtering of MOSx coatings
Authors: Wieërs, E ×
Wang, Jihui
Lauwerens, W
Celis, Jean-Pierre
Stals, L.M #
Issue Date: Sep-2000
Publisher: DGO
Host Document: PSE 2000, 7th International Conference on Plasma Surface Engineering, Conference and Exhibition vol:57 or 07:6
Conference: International Conference on Plasma Surface Engineering edition:7 location:Garmisch-Partenkirchen, Germany date:17-21 September 2000
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
× corresponding author
# (joint) last author

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