|ITEM METADATA RECORD
|Title: ||Ion energy distribution during the pulsed sputtering of MOSx coatings|
|Authors: ||Wieërs, E ×|
Stals, L.M #
|Issue Date: ||Sep-2000 |
|Host Document: ||PSE 2000, 7th International Conference on Plasma Surface Engineering, Conference and Exhibition vol:57 or 07:6|
|Conference: ||International Conference on Plasma Surface Engineering edition:7 location:Garmisch-Partenkirchen, Germany date:17-21 September 2000|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Chemical and Extractive Metallurgy Section (-)|
× corresponding author|
# (joint) last author|
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