Title: Characterisation of ALD diffusion barrier on Low-k dielectric polymer
Authors: Hoyas, A.M ×
Schuhmacher, J
Shamiryan, D
Celis, Jean-Pierre
Maex, Karen #
Issue Date: May-2002
Conference: Workshop 'Trends in Applied Surface Science' location:Namur, Belgium date:23-24 May 2002
Description: workshop organized by Belvac-Nevac and LISE-FUNDP

poster presentation
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Chemical and Extractive Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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