Title: Molecular hydrogen interaction kinetics of interfacial Si dangling bonds in thermal (111)Si/SiO2
Authors: Stesmans, Andre
Issue Date: 2000
Publisher: Kluwer
Host Document: Defects in SiO2 and related dielectrics: science and technology vol:2 pages:529-556
Description: NATO science series. 2: Mathematics, physics and chemistry
ISBN: 0-7923-6685-9
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:Semiconductor Physics Section

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