Title: CeO2 buffer layers on R-plane Al2O3
Authors: Chromik, S ×
Spanková, M
Vávra, I
Gazi, S
Cannaerts, Maarten
Hellemans, Louis
Machajdik, D
Benacka, S #
Issue Date: Aug-2000
Series Title: Acta physica Slovaca vol:50 issue:4 pages:403-409
Abstract: We present a summary of some published results concerning the preparation and study of the properties of CeO2 buffer layers on R-plane Al2O3 Further, we discuss some of our results which concern to CeO2 films prepared by electron gun-evaporation, by on-axis rf magnetron sputtering in mixture of Ar and O-2 and by off-axis rf diode sputtering in pure oxygen. As-deposited alms show granular structure except for films prepared by electron gun-evaporation which already consist of rectangular blocks. Atomic Force Microscopy (AFM) reveals that the presence of even negligible (111) parasitic peak in X-ray diffraction spectrum of the as-deposited films strongly influences the rocking curve and surface morphology after post-deposition heat treatment in air. The post-annealings suppress (111) peak in X-ray spectrum, however, the rocking curves and AFM results differ depending on the method of preparation. Some rocking curves seem to be a superposition of a very narrow rocking curve (0.04 degrees) with a broader one (0.5-1.4 degrees). The origin of such behaviour is discussed
ISSN: 0323-0465
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
× corresponding author
# (joint) last author

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