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Title: Stiffening and Hydrophilisation of SOG Low-k Material Studied by Ellipsometric Porosimetry, UV Ellipsometry and Laser-induced Surface Acoustic Waves
Authors: Urbanowicz, Adam ×
Meshman, Boris
Schneider, Dieter
Baklanov, Mikhail #
Issue Date: Apr-2008
Publisher: Wiley-VCH
Series Title: Physica Status Solidi A-Applications and Materials Science vol:205 issue:4 pages:829-832
Abstract: In this paper we evaluate the correlation between UV light absorption of SOG (spin-on glass) low dielectric constant (low-k) films and chemical changes induced by an excimer UV source at several wavelengths: 172 rim, 222 ran, and 308 nm. Low-k absorption in the UV range was measured by nitrogen purged UV ellipsometry. It is shown that imprevenient of mechanical properties is accompanied by degradation (hydrophilisation) of low-k films. Changes in hydrophobic properties were evaluated by water-source ellipsometric porosimetry (WEP). The Young's moduli of the films were measured by laser-induced surface acoustic waves (LAwaves).
ISSN: 0031-8965
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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