Title: Fabrication and testing of custom vacuum encapsulations deposited by focused ion beam direct-write CVD
Authors: Reyntjens, Steve
Puers, Robert #
Issue Date: 2000
Host Document: Eurosensors pages:541-544
Conference: Eurosensors location:Copenhagen, Denmark date:August 27-30
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
# (joint) last author

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