Title: Pattern transfer over extreme topographies using a SU-8 leveling process
Authors: Ceyssens, Frederik ×
Puers, Robert #
Issue Date: 2006
Host Document: SPIE vol:6415 pages:G1-G6
Conference: SPIE
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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