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Title: Surface micromachined platinum structures with a hign thermal stability
Authors: Ekkels, Phillip
Rottenberg, X
Puers, Robert
Tilmans, H #
Issue Date: 2007
Host Document: MEMS 2007 pages:325-328
Conference: MEMS 2007 date:January 21-25
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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