Title: Influence of the substrate on the lifetime of capacitive RF MEMS switches
Authors: Czarnecki, Piotr
Rottenberg, X
Soussan, P
Ekkels, P
Muller, P
Nolmans, P
De Raedt, W
Tilmans, H
Puers, Robert
Marchand, L
De Wolf, Ingrid #
Issue Date: Jan-2008
Host Document: Micro Electro Mechanical Systems 2008 (MEMS 2008) pages:172-175
Conference: IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008. MEMS 2008 date:13-17 Jan. 2008
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Department of Materials Engineering - miscellaneous
# (joint) last author

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