Title: Extremely miniaturized capacitive movement sensors using new suspension systems
Authors: Puers, Robert ×
Lapadatu, Daniel #
Issue Date: 1994
Publisher: Elsevier Sequoia
Series Title: Sensors and Actuators vol:A41-A42 pages:129-135
ISSN: 0250-6874
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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