Title: Characterization of the electrostatic bonding of silicon and Pyrex glass
Authors: Cozma Lapadatu, Adriana ×
Puers, Robert #
Issue Date: 1995
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:5 issue:2 pages:98-102
Conference: location:Pisa, Italy date:June
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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