Title: Creep as a reliability problem in MEMS
Authors: Modlinski, Robert ×
Witvrouw, Ann
Ratchev, P
Jourdain, A
Simons, V
Tilmans, H.A.C
den Toonder, J
Puers, Robert
De Wolf, Ingrid #
Issue Date: 2004
Series Title: Microelectronics Reliability vol:44 pages:1733-1738
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
Department of Materials Engineering - miscellaneous
Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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