Title: Production of seismic mass suspensions in silicon by electro-discharge machining
Authors: Reynaerts, Dominiek ×
Meeussen, Wim
Van Brussel, Hendrik
Reyntjens, Steve
Puers, Robert #
Issue Date: Jun-1998
Host Document: Proceedings of the Micromechanics Europe pages:252-255
Conference: Micromechanics Europe location:Ulvik, Norway date:Jun 3, 1998
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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