Title: Microstructuring of silicon by electro-discharge machining (EDM) - part II: applications
Authors: 's Heeren, Paul-Henri
Reynaerts, Dominiek
Van Brussel, Hendrik
Beuret, C
Larsson, PO
Bertholds, A #
Issue Date: Jun-1997
Publisher: Elsevier Science SA
Series Title: Sensors and Actuators A-Physical vol:61 issue:1-3 pages:379-386
Abstract: Micro electro-discharge machining (EDM) is introduced as a new technique to produce microstructures. The main advantages of micro-EDM are its low installation cost, high accuracy and large design freedom. Micro-EDM can indeed easily machine complex three-dimensional shapes that prove difficult for etching techniques. The primary applications of micro-EDM are in rapid prototyping and products with small batch sizes. However, the technique is versatile enough to be adapted to large series. Several examples are given of the possibilities of micro-EDM: an elastic force motor, micromirrors, an acceleration sensor and a microspring. Also the machine on which these structures were made is introduced. EDM requires electrodes as a tool. A reliable method for producing these electrodes, with custom shape and small sizes, is also presented
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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