Title: Machining of three-dimensional microstructures in silicon by EDM
Authors: 's Heeren, Paul-Henri
Reynaerts, Dominiek
Van Brussel, Hendrik #
Issue Date: Sep-1997
Host Document: Proceedings of the Eurosensors XI pages:301-304
Conference: Eurosensors XI location:Warsaw, Poland date:Sep 21-24, 1997
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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