Title: Microstructuring of silicon by electro-discharge machining (EDM) part I: theory
Authors: Reynaerts, Dominiek
's Heeren, Paul-Henri
Van Brussel, Hendrik #
Issue Date: Sep-1996
Host Document: Proceedings of the Eurosensors X Conference pages:251-254
Conference: Eurosensors X Conference location:Leuven, Belgium date:Sep 8-11, 1996
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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