Title: Extraction of the mechanical surface in measurement of nano structures
Authors: Dietzsch, M
Gröger, S
Gerlach, M
Krystek, M
Vanherck, Paul #
Issue Date: Jul-2007
Publisher: Technische Rundschau Edition Colibri LTD
Series Title: CIRP Annals-Manufacturing Technology vol:56 issue:1 pages:537-540
ISSN: 0007-8506
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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