Title: A study on the elimination of microcracks in a sparked silicon surface
Authors: Song, Xiaoyan ×
Reynaerts, Dominiek
Meeussen, Wim
Van Brussel, Hendrik #
Issue Date: May-2001
Publisher: Elsevier Science SA
Series Title: Sensors and Actuators A-Physical vol:92 issue:1/3 pages:286-291
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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