Title: Production and assembly of a hydraulic microactuator
Authors: De Volder, MichaĆ«l
Peirs, Jan
Reynaerts, Dominiek
Coosemans, Johan
Puers, Robert
Smal, O
Raucent, B #
Issue Date: Sep-2004
Host Document: Proceedings of the 15th MicroMechanics Europe Workshop pages:37-40
Conference: 15th MicroMechanics Europe Workshop location:Leuven, Belgium date:Sep 5-7, 2004
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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