ITEM METADATA RECORD
Title: Investigation of micro-EDM for silicon microstructure fabrication
Authors: Song, X
Reynaerts, Dominiek
Meeusen, Wim
Van Brussel, Hendrik #
Issue Date: Apr-2005
Host Document: Proceedings of the International Society for Optical Engineering Conference pages:792-799
Conference: International Society for Optical Engineering Conference edition:2005 location:Strassbourg, France date:Apr 4, 2005
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science