Title: Investigation of micro-EDM for silicon microstructure fabrication
Authors: Song, X
Reynaerts, Dominiek
Meeusen, Wim
Van Brussel, Hendrik #
Issue Date: Apr-2005
Host Document: Proceedings of the International Society for Optical Engineering Conference pages:792-799
Conference: International Society for Optical Engineering Conference edition:2005 location:Strassbourg, France date:Apr 4, 2005
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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