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Title: Modelling and characterisation of an ortho-planar micro-valve
Authors: Smal, O
Behez, B
Raucent, B
Devolder, M
Peirs, Jan
Reynaerts, Dominiek
Ceyssens, Frederik
Coosemans, J
Puers, Robert #
Issue Date: Jun-2006
Host Document: Proceedings of the International Precision Assembly Seminar pages:315-326
Conference: International Precision Assembly Seminar location:Bad Hofgastein, Austria date:Jun 20-22, 2006
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Production Engineering, Machine Design and Automation (PMA) Section
# (joint) last author

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