Title: Thermal stability of the SrTiO3/(Ba,Sr)O stacks epitaxially grown on Si
Authors: Marchiori, C ×
Sousa, M
Guiller, A
Siegwart, H
Locquet, Jean-Pierre
Fompeyrine, J
Norga, GJ
Seo, Jin Won #
Issue Date: 2006
Series Title: Applied Physics Letters vol:88 issue:7
Conference: date:IBM Res GmbH, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland; Politecn Milan, LNESS, Dipartimento Fis, I-22100 Como, Italy; Ecole Polytech Fed Lausanne, IPMC, CH-1015 Ecublens, Switzerland
Article number: 072913
Abstract: The growth of epitaxial SrTiO3 on silicon relies on the preparation of a template layer consisting of a mixture of barium oxide and strontium oxide, (Ba,Sr)O. In this letter, the limited thermal stability of this template layer is demonstrated. X-ray photoemission spectroscopy measurements reveal that both SrTiO3/(Ba,Sr)O and (Ba,Sr)O/Si interfaces are susceptible to chemical reactions upon thermal treatment to an extent that is correlated with the thermal budget. These results have strong implications on the overall viability of (Ba,Sr)O as template for the growth of crystalline oxides on Si.
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
Physical Metallurgy and Materials Engineering Section (-)
× corresponding author
# (joint) last author

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