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Title: Local electrochemical oxidation/reduction: First step towards a new lithography?
Authors: Locquet, Jean-Pierre ×
Arrouy, F
Machler, E
Despont, M
Bauer, P
Williams, EJ #
Issue Date: 1996
Publisher: AMER INST PHYSICS
Series Title: Applied Physics Letters vol:68 issue:14 pages:1999-2001
Conference: date:UNIV ZURICH,INST INORGAN CHEM,CH-8057 ZURICH,SWITZERLAND; UNIV BASEL,INST PHYS,CH-4056 BASEL,SWITZERLAND; UNIV GENEVA,DEPT PHYS MAT CONDENSEE,CH-1211 GENEVA,SWITZERLAND
Abstract: Using c-axis La2CuO4 thin films, we first demonstrate that the electrochemical oxidation mainly occurs along the c axis. Then we induce oxygen-rich regions electrochemically into an otherwise oxygen-deficient matrix. On a microscopic scale the extra oxygen introduced creates metallic and/or superconducting regions in the insulating matrix. Contrary to other lithographic techniques in which large amounts of material are either removed or deposited, this technique does not induce significant height differences. (C) 1996 American Institute of Physics.
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
× corresponding author
# (joint) last author

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