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Title: Benzoylpivaloylmethanide precursors for the chemical beam epitaxy of oxide thin films .1. Synthesis, characterization, and use of yttrium benzoylpivaloylmethanide
Authors: Fritsch, E ×
Machler, E
Arrouy, F
Orama, O
Berke, H
Povey, I
Willmott, PR
Locquet, Jean-Pierre #
Issue Date: 1997
Publisher: AMER CHEMICAL SOC
Series Title: Chemistry of materials vol:9 issue:1 pages:127-134
Conference: date:UNIV ZURICH,INST INORGAN CHEM,CH-8057 ZURICH,SWITZERLAND; IBM CORP,ZURICH RES LAB,DIV RES,CH-8803 RUSCHLIKON,SWITZERLAND; VTT CHEM TECHNOL,ESPOO 02044,FINLAND; UNIV ZURICH,INST PHYS CHEM,CH-8057 ZURICH,SWITZERLAND
Abstract: The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.
ISSN: 0897-4756
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Solid State Physics and Magnetism Section
× corresponding author
# (joint) last author

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