Chemistry of materials vol:9 issue:1 pages:127-134
date:UNIV ZURICH,INST INORGAN CHEM,CH-8057 ZURICH,SWITZERLAND; IBM CORP,ZURICH RES LAB,DIV RES,CH-8803 RUSCHLIKON,SWITZERLAND; VTT CHEM TECHNOL,ESPOO 02044,FINLAND; UNIV ZURICH,INST PHYS CHEM,CH-8057 ZURICH,SWITZERLAND
The new complex yttrium benzoylpivaloylmethanide and its acetonitrile adduct have been characterized by IR, NMR, mass spectroscopy, X-ray structure analysis, and thermogravimetric/differential thermal analysis. In situ flux measurements and mass spectroscopic studies have been performed to test the suitability of this compound as a precursor for the deposition of complex oxide thin films under molecular beam conditions. Finally it has been used to deposit epitaxial Y2O3 (001) thin films on SrTiO3 (001) substrates.