Advanced Etch Technology for Nanopatterning II, Date: 2013/01/24 - 2013/01/02, Location: San Jose, CA USA

Publication date: 2013-01
Volume: 8685 Pages: 86850 -
ISSN: 0277-786X, 1996-756X
DOI: 10.1117/12.2013602
Publisher: Society of Photo-optical Instrumentation Engineers

Advanced Etch Technology for Nanopatterning II

Author:

Boullart, Werner
Radisic, Dunja ; Paraschiv, Vasile ; Cornelissen, Sven ; Manfrini, Mauricio ; yatsuda, koichi ; Nishimura, Eiichi ; Ohishi, Tetsuya ; Tahara, Shigeru

Keywords:

Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Engineering, Science & Technology - Other Topics, MAGNETIC TUNNEL-JUNCTION, ETCH CHARACTERISTICS