IEEE Transactions on Instrumentation and Measurement

Publication date: 2012-01
Volume: 61 Pages: 1979 - 1990
ISSN: 0018-9456, 1557-9662
DOI: 10.1109/TIM.2011.2179829
Publisher: Institute of Electrical and Electronics Engineers

Author:

Stucchi, Michele
Velenis, Dimitrios ; Katti, Guruprasad

Keywords:

Science & Technology, Technology, Engineering, Electrical & Electronic, Instruments & Instrumentation, Engineering, Capacitance measurements, impedance measurements, metal-insulator-semiconductor (MIS) capacitor, quasistatic C-V (QSCV), through-silicon via (TSV), 2-D and 3-D IC interconnects, Electrical & Electronic Engineering, 0906 Electrical and Electronic Engineering, 0299 Other Physical Sciences