Microelectronic Engineering

Publication date: 2011-01
Volume: 88 Pages: 1408 - 1411
ISSN: 0167-9317, 1873-5568
DOI: 10.1016/j.mee.2011.03.094
Publisher: North-Holland

Author:

Amat, E
Rodriguez, R ; Bargallo Gonzalez, Mireia ; Martin-Martinez, J ; Nafria, M ; Aymerich, X ; Verheyen, Peter ; Simoen, Eddy

Keywords:

Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, Strain, High-k, Hot-carriers, Reliability, MOSFETS, Applied Physics, 0906 Electrical and Electronic Engineering, 0204 Condensed Matter Physics, 0299 Other Physical Sciences