Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures

Publication date: 2012-01
Volume: 30 Pages: 06 -
ISSN: 1071-1023
DOI: 10.1116/1.4758772
Publisher: Published for the Society by the American Institute of Physics

Author:

Winroth, Gustaf
Younkin, Todd ; Blackwell, James M ; Gronheid, Roel

Keywords:

Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, CHEMICALLY AMPLIFIED RESISTS, LITHOGRAPHY, Applied Physics, 0401 Atmospheric Sciences, 0912 Materials Engineering, 0901 Aerospace Engineering