Microelectronic Engineering

Publication date: 2013-01
Volume: 110 Pages: 100 - 107
ISSN: 0167-9317, 1873-5568
DOI: 10.1016/j.mee.2013.02.037
Publisher: North-Holland

Author:

Vaglio Pret, Alessandro
Kunnen, Eddy ; Gronheid, Roel ; Pargon, Erwine ; Luere, Olivier ; Bianchi, Davide

Keywords:

Science & Technology, Technology, Physical Sciences, Engineering, Electrical & Electronic, Nanoscience & Nanotechnology, Optics, Physics, Applied, Engineering, Science & Technology - Other Topics, Physics, Lithography, LER, LWR, CD-SEM, CD-AFM, LINEWIDTH ROUGHNESS, EDGE, RESIST, Applied Physics, 0906 Electrical and Electronic Engineering, 0204 Condensed Matter Physics, 0299 Other Physical Sciences