Advances in Resist Materials and Processing Technology XXVII, Date: 2010/02/21 - 2010/02/21, Location: San Jose, CA USA

Publication date: 2010-01
Volume: 7639 Pages: 763930 -
ISSN: 0277-786X
DOI: 10.1117/12.848355
Publisher: Society of Photo-optical Instrumentation Engineers

Advances in Resist Materials and Processing Technology XXVII

Author:

Vaglio Pret, Alessandro
Gronheid, Roel ; Foubert, Philippe

Keywords:

Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Optics, Physics, Applied, Polymer Science, Materials Science, Physics, 3 sigma LWR, post-litho process, smoothing techniques, frequency analysis, LINE-EDGE ROUGHNESS, PERFORMANCE