Metrology, Inspection, and Process Control XXV, Date: 2011/01/02 - 2011/01/27, Location: San Jose, CA USA

Publication date: 2011-01
Volume: 7971
ISSN: 0277-786X, 1996-756X
DOI: 10.1117/12.881592
Publisher: Society of Photo-optical Instrumentation Engineers

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXV, PT 1 AND PT 2

Author:

Kuppuswamy, Vijaya-Kumar Murugesan
Constantoudis, Vassilios ; Gogolides, Evangelos ; Gronheid, Roel ; Vaglio Pret, Alessandro

Keywords:

Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Optics, Physics, Applied, Physics, LER, NM