Microelectronic Engineering

Publication date: 2010-01
Volume: 87 Pages: 1195 - 1197
ISSN: 0167-9317, 1873-5568
Publisher: North-Holland

Author:

Rudra, S
Roels, J ; Bryce, G ; Haspeslagh, L ; Witvrouw, Ann ; Van Thourhout, D

Keywords:

Optical MEMS, SiGe, Diffractive gratings, 0906 Electrical And Electronic Engineering, Applied Physics