11th International Conference on Solid-State Sensors and Actuators, Date: 2001/06/10 - 2001/06/14, Location: Munich, Germany

Publication date: 2001-01
Pages: 988 - 991
ISBN: 3-540-42150-5
Publisher: Springer-Verlag Berlin; Berlin

Transducers '01: Eurosensors XV, Digest of Technical Papers, Vols 1 and 2


Sedky, S
Witvrouw, Ann ; Baert, Kris


poly SiGe, surface micromachining, CMOS post processing, Science & Technology, Technology, Physical Sciences, Engineering, Biomedical, Engineering, Electrical & Electronic, Optics, Polymer Science, Engineering